Micro electro mechanical system (MEMS)

December 21, 2006 1:34am CST
Micro-Electro-Mechanical Systems (MEMS) is the integration of mechanical elements, sensors, actuators, and electronics on a common silicon substrate through microfabrication technology. While the electronics are fabricated using integrated circuit (IC) process sequences (e.g., CMOS, Bipolar, or BICMOS processes), the micromechanical components are fabricated using compatible "micromachining" processes that selectively etch away parts of the silicon wafer or add new structural layers to form the mechanical and electromechanical devices
1 response
@sureshmoe (974)
• India
21 Dec 06
Thank for ur info...I need the more details about this...Where it is used? Why? How? it uses? technicll words used? is it a new technology? and so on ..tell me about this indetail...
• India
2 Jan 07
MEMS is my seminar topic for mor details visit my site www.shiljith.blogspot.com where you can download the details of MEMS on the caption "My seminar is over"